Overview
Compact prober optimized for chip level IV/CV measurement
- This prober supports sample sizes of up to 50 mm and is an integrated type even with a shield box.
- It is capable of measuring low-level current IV and capacitance CV and RF.
- The compact, light weight prober lets you carry it easily.
Applications
- Low level IV (fA)
- Low level CV (fF)
- RF measurement
- Various resistance measurements such as sheet resistance
- Temperature characteristic test in high and low temperature environment
Options
- Hot chuck from room temperature to 200°C
- Triaxial connection to chuck
- Interlock mechanism in conjunction with a measuring instrument
Optical System Selection
- Stereomicroscope (default)
- Trinocular microscope
- Zoom micro CCD camera
Examples of measuring instruments to be connected
- Device Analyzers/Parameter analyzers
- Source Measure Units
- Curve Tracers
- Precision LCR meters
- Digital multimeters
- Impedance Analyzers
- Network Analyzers
- In addition, various measuring instruments of each company
Specifications
| MBP-55 | |
|---|---|
| Wafer chuck size | ～50mm |
| Stage travel range (Coarse) | - |
| Stage travel range (Fine) | - |
| Stage e travel | - |
| Z Stage travel | - |
| Z Stage fine travel | - |
| Dimensions | W630×H340×D380㎜ |
| Weight | 24㎏ |
Gallery
