Probing Solutions

Manual Probe System α100

Manual Probe System α100


4 inch Manual Probe System with for accurate and reliable IV/CV, RF and measurements

  • It is a compact prober which corresponds to the wafer size up to 4 inch.
  • With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air bearing design, reliable alignment is possible.
  • Z movement of the platen has coarse movement that can be operated with a lever, and fine movement that can be adjusted with micrometer.
  • It is user-friendly design.


  • Low level IV (fA)
  • Low level CV (fF)
  • RF measurement
  • Various resistance measurements such as sheet resistance
  • Temperature characteristic test in high and low temperature environment


  • Hot chuck from room temperature to 300°C
  • Triaxial connection to chuck
  • Storage in a DarkBox
  • Probe card (4 .5 inch square PCB)

Optical System Selection

  • Stereomicroscope (default)
  • Trinocular microscope
  • Zoom micro CCD camera

Examples of measuring instruments to be connected

  • Device Analyzers/Parameter analyzers
  • Source Measure Units
  • Curve Tracers
  • Precision LCR meters
  • Digital multimeters
  • Impedance Analyzers
  • Network Analyzers
  • In addition, various measuring instruments of each company


Support wafer size Chip level ~ 4 inch wafer
Stage travel range (Coarse) X:100㎜ Y:110㎜
Stage travel range (Fine) X:±6.5㎜ Y:±6.5㎜
Stage e travel ±5°
Z Stage travel 0ー0.3ー5㎜
Z Stage fine travel 5㎜
Dimensions W320×H355×D490㎜
Weight 25㎏