Overview
Chuckstage that can control temperature of heating and cooling
- 50mm , 4 inches to 12 inches in size.
- The product is lined up in the temperature range of -55℃ to +350℃.
- We propose a combination of heaters, chillers, and pellets according to the specifications.
- The measurement from microcurrent and high voltage, large current measurement is carried out.
- Low noise due to use of DC power supply.
Options
- Price setting based on temperature range
- Triaxial connection to chuck
- High-power chuck
- Structures for various instrument connections
- Air-cooled, water-cooled type prepare
Product Details
Product name | Model number | Remarks |
---|---|---|
50㎜ Hot Chuck | HC2 | 50㎜ RT to 200°c |
4inch hot chuck | HC4 | 4RT to 350°c |
6inch hot chuck | HC6 | 6RT to 350°c |
8inch hot chuck | HC8 | 8RT to 350°c |
12inch hot chuck | HC12 | 12RT to 350°c |
Product name | Model number | Remarks |
---|---|---|
4inch peltjer type thermo chuck | TCP4 | 4inch -40° C to 125°C |
8inch peltjer type thermo chuck | TCP8 | 8inch -20° C to 100°c |
6inch peltjer type thermo chuck | TCC6 | 6inch -60° C to 350° C |
8inch peltjer type thermo chuck | TCC8 | 8inch -60° C to 350°C |
12inch peltjer type thermo chuck | TCC12 | 12inch -60° C to 350° C |