Manual Probe System α200CS α300CS

Temperature characteristic evaluation from -60 °C to +350 °C

• It is a Manual Probe System which supports wafer sizes of 8 inch and 12 inch respectively.
• It has a compact shield to prevent dew condensation.
• The compact shield provides a low noise environment.
• With XY coarse movement and fine adjustment using micrometer that can be quickly positioned by air bearing design, reliable alignment is possible.
• Z movement of the platen has coarse movement that can be operated with a lever, and fine movement that can be adjusted with micrometer.

• Low level IV (fA)
• Low level CV (fF)
• Probe solution for high-power devices 20kV DC/200A
• RF measurement
• Various resistance measurements such as sheet resistance
• Temperature characteristic test in high and low temperature environment
• Reliability test such as TDDB

• Thermal chuck from -60°C to +350°C
• Triaxial connection to chuck
• High-power chuck
• Change to use CCD camera
• Probe card (4 .5 inch square PCB)
• Combination with various light sources

• Stereomicroscope (default)
• Trinocular microscope
• Zoom micro CCD camera
• Mitutoyo Finescope FS70Z series and FZ70L

• Device Analyzers/Parameter analyzers
• Power Device Analyzer
• Source Measure Units
• Curve Tracers
• Precision LCR meters
• Digital multimeters
• Impedance Analyzers
• Network Analyzers
• In addition, various measuring instruments of each company